A new robust damping and tracking controller for SPM positioning stages

Proceedings of the American Control Conference

Volumn , Issue , 2009, Pages 289-294

  Fleming, Andrew J ^a   Aphale, Sumeet S ^b   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

^b UNIVERSITY OF ABERDEEN   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AT-SPEED; CALIBRATION STANDARD; CLOSED-LOOP; DIGITAL CONTROLLERS; INTEGRAL CONTROLLERS; LOW SPEED; PID CONTROLLERS; POSITION SENSORS; POSITIONING STAGE; RESONANCE FREQUENCIES; SCANNING PROBE MICROSCOPE; SECOND ORDERS; TRACKING CONTROLLER;

INSTRUMENT SCALES; MICROSCOPES; PROBES; PROPORTIONAL CONTROL SYSTEMS; RESONANCE; SCANNING; SENSORS; THREE TERM CONTROL SYSTEMS;

CONTROLLERS;

EID: 70449719601     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2009.5159934     Document Type: Conference Paper

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