Improvement of accuracy and speed of a commercial AFM using positive position feedback control

Proceedings of the American Control Conference

Volumn , Issue , 2009, Pages 973-978

  Mahmood, I A ^a   Moheimani, S O R ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ADVERSE EFFECT; AFM; ATOMIC FORCE MICROSCOPES; ATOMIC LEVELS; CROSS-COUPLINGS; FEED-BACK LOOP; FEEDBACK CONTROLLER; HIGH RESOLUTION; HYSTERESIS NONLINEARITY; IMAGING SPEED; INDUCED VIBRATIONS; NANO SCALE; OPEN LOOPS; PI CONTROLLER; POSITION SENSORS; POSITIVE POSITION FEEDBACK; PROPER DESIGN; SAMPLE SURFACE; SCANNING SPEED; THERMAL DRIFTS; THREE DIMENSIONS; TOPOGRAPHIC IMAGES;

ATOMIC FORCE MICROSCOPY; CONTROLLERS; CREEP; FEEDBACK CONTROL; HYSTERESIS; NONLINEAR CONTROL SYSTEMS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SCANNING;

FEEDBACK;

EID: 70449631200     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2009.5160335     Document Type: Conference Paper

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