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Volumn 562, Issue , 2013, Pages 5-10
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Structure, mechanical properties and thermal stability of CrAlN/ZrO 2 nanomultilayers deposited by magnetron sputtering
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Author keywords
CrAlN ZrO2; Mechanical properties; Microstructure; Nanomultilayer; Phase transitions; Thermal stability
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Indexed keywords
CRALN/ZRO2;
ELEVATED TEMPERATURE;
FIELD EMISSION SCANNING ELECTRON MICROSCOPY;
HARDNESS AND ELASTIC MODULUS;
HIGH-TEMPERATURE ANNEALING;
NANOINDENTATION TECHNIQUES;
NANOMULTILAYER;
REACTIVE MAGNETRON SPUTTERING;
ELASTIC MODULI;
EPITAXIAL GROWTH;
FIELD EMISSION MICROSCOPES;
HARDNESS;
INDENTATION;
MAGNETRON SPUTTERING;
MECHANICAL PROPERTIES;
MICROSTRUCTURE;
PHASE TRANSITIONS;
THERMODYNAMIC STABILITY;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
ZIRCONIUM ALLOYS;
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EID: 84874943700
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2013.02.020 Document Type: Article |
Times cited : (27)
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References (36)
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