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Volumn 104, Issue 11, 2008, Pages

Stabilization of tetragonal and cubic phases of ZrO2 in pulsed sputter deposited ZrO2 / Al2 O3 and ZrO2 / Y2 O3 nanolayered thin films

(3) Barshilia, Harish C a Deepthi, B a Rajam, K S a

a SURFACE ENGINEERING DIVISION (India)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; DATA STRUCTURES; MODULATION; MULTILAYER FILMS; MULTILAYERS; OZONE WATER TREATMENT; POLYMORPHISM; SOLIDS; STABILIZATION; THIN FILMS; VAPOR DEPOSITION; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS STRUCTURES; COLUMNAR MICROSTRUCTURES; CRITICAL RADIUSES; CROSS SECTIONS; CUBIC PHASIS; LAYER THICKNESSES; MICROCOLUMNS; MODULATION WAVELENGTHS; MULTILAYER SYSTEMS; NANOINDENTATION HARDNESSES; PULSED SPUTTERING; PULSED SPUTTERS; SATELLITE REFLECTIONS; SUBSTRATE TEMPERATURES; SUPERLATTICE STRUCTURES; THIRD ORDERS; X-RAY DIFFRACTIONS; XRD STUDIES;

FILM PREPARATION;

EID: 58149262946 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3040720 Document Type: Article

Times cited : (25)

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