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Volumn 58, Issue 27-28, 2004, Pages 3477-3480
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Coherent growth and superhardness effect of AlN/TiN nanomultilayers
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Author keywords
AlN TiN nanomultilayers; Coherent growth; Cubic AlN; Superhardness effect
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Indexed keywords
CRYSTAL STRUCTURE;
EPITAXIAL GROWTH;
LATTICE CONSTANTS;
MICROHARDNESS;
SPUTTERING;
STRAIN;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION;
COHERENT GROWTH;
CUBIC AIN;
NANOMULTILAYERS;
SUPERHARDNESS EFFECTS;
TITANIUM COMPOUNDS;
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EID: 4944244081
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2004.07.005 Document Type: Article |
Times cited : (31)
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References (18)
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