SCOPUS 정보 검색 플랫폼

Volumn 520, Issue 6, 2012, Pages 2032-2035

Crystallization of amorphous AlN and superhardness effect in VC/AlN nanomultilayers

(3) Li, Geyang a Li, Guanqun a Li, Yuge a

Author keywords

Aluminum nitride; Coherent growth; Crystallization; Hardness; Multilayers; Sputtering; Transmission Electron Microscopy; Vanadium carbide

Indexed keywords

ALN; ALN LAYERS; COHERENT GROWTH; CUBIC STRUCTURE; ENHANCED HARDNESS; MICROSTRUCTURE EVOLUTIONS; MULTITARGET; NANOMULTILAYERS; SUPERHARDNESS EFFECT; TEMPLATE EFFECTS; TRANSMISSION ELECTRON; VANADIUM CARBIDE;

ALUMINUM NITRIDE; CARBIDES; CRYSTALLIZATION; HARDNESS; MAGNETRON SPUTTERING; NITRIDES; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; VANADIUM;

MULTILAYERS;

EID: 84855960245 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.09.079 Document Type: Article

Times cited : (21)

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