Investigation on microstructure and properties of CrAlN/AlON nanomultilayers

Applied Surface Science

Volumn 257, Issue 22, 2011, Pages 9583-9586

  Zheng, Kangpei ^a   Liu, Ping ^a   Li, Wei ^a   Ma, Fengcang ^a   Liu, Xinkuan ^a   Chen, Xiaohong ^a  

^a UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

Author keywords

Amorphous crystallization; CrAlN AlON nanomultilayers; Epitaxial growth; Superhardness effect

Indexed keywords

ALUMINUM COMPOUNDS; CHROMIUM COMPOUNDS; EPITAXIAL GROWTH; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INDENTATION; MECHANICAL PROPERTIES; MICROSTRUCTURE; MULTILAYERS; SODIUM CHLORIDE; X RAY DIFFRACTION;

AMORPHOUS STRUCTURES; MAXIMUM HARDNESS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MICROSTRUCTURE AND PROPERTIES; NANOINDENTATION TECHNIQUES; NANOMULTILAYERS; REACTIVE MAGNETRON SPUTTERING; SUPERHARDNESS EFFECT;

NITROGEN COMPOUNDS;

EID: 80051550006     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.06.069     Document Type: Article

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