Microfabricated V-groove power inductors using multilayer Co-Zr-O thin films for very-high-frequency DC-DC converters

IEEE Transactions on Power Electronics

Volumn 28, Issue 9, 2013, Pages 4384-4394

  Yao, Di ^a   Levey, Christopher G ^a   Tian, Rui ^a   Sullivan, Charles R ^a  

^a DARTMOUTH COLLEGE   (United States)

Author keywords

High frequency dc dc converter; inductors; microfabricated inductor; thin films; V groove; very high frequency (VHF) power conversion

Indexed keywords

CORE MATERIAL; DC RESISTANCE; DC-DC BUCK CONVERTER; EDDY CURRENT-LOSS; HIGH FREQUENCY HF; HIGH-EFFICIENCY; HIGH-POWER-DENSITY; MAGNETIC PERFORMANCE; MICRO INDUCTORS; MICROFABRICATED; NANO-GRANULAR; POWER DENSITIES; QUALITY FACTORS; SI SUBSTRATES; V GROOVES; V-GROOVE; VERY-HIGH-FREQUENCY POWER CONVERSIONS;

COBALT; COREMAKING; DC-DC CONVERTERS; EFFICIENCY; FILM PREPARATION; MAGNETIC THIN FILMS; MICROFABRICATION; MULTILAYER FILMS; MULTILAYERS; THIN FILMS; ZIRCONIUM;

ELECTRIC INDUCTORS;

EID: 84874618883     PISSN: 08858993     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPEL.2012.2233760     Document Type: Article

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