Micro-fabricated thin-film inductors for on-chip power conversion

2012 7th International Conference on Integrated Power Electronics Systems, CIPS 2012

Volumn , Issue , 2012, Pages

  Harburg, Daniel V ^a   Yu, Xuehong ^b   Herrault, Florian ^b   Levey, Christopher G ^a   Allen, Mark G ^b   Sullivan, Charles R ^a  

^a DARTMOUTH COLLEGE   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERTER EFFICIENCY; HIGH-EFFICIENCY; HIGH-POWER-DENSITY; INDUCTORS ON SILICON; OPTIMIZED DESIGNS; POWER CONVERSION; PROCESSING STEPS; RADICAL REDUCTION;

COBALT; DC-DC CONVERTERS; EFFICIENCY; MAGNETIC MATERIALS; SILICON;

ELECTRIC INDUCTORS;

EID: 84881103649     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. "Multi-Year Program Plan FY'09-FY'14: Solid-State Lighting Research and Development," Office of Energy Efficiency and Renewable Energy, US Dept. of Energy by Navigant Consulting, Radcliffe Advisors, and SSLS., Mar. 2008.
2. D. S. Gardner, G. Schrom, F. Paillet, B. Jamieson, T. Karnik, and S. Borkar, "Review of On-Chip Inductor Structures With Magnetic Films," IEEE Transactions on Magnetics, vol. 45, no. 10, pp. 4760-4766, Oct. 2009.
3. M. Yamaguchi, K. Suezawa, and Y. Takahashi, "Magnetic thinfilm inductors for RF-integrated circuits," Journal of Magnetism and Magnetic Materials, vol. 216, pp. 807-810, 2000.
4. L. Daniel, C. Sullivan, and S. Sanders, "Design of microfabricated inductors," IEEE Transactions on Power Electronics, vol. 14, no. 4, pp. 709-723, Jul. 1999.
5. S. Prabhakaran, D. Kreider, C. Sullivan, and C. Levey, "Fabrication of thin-film V-groove inductors using composite magnetic materials," in InternationalWorkshop on Integrated Power Packaging. IEEE, 2000, pp. 102-105.
6. Y. Shimada, M. Yamaguchi, S. Ohnuma, T. Itoh, W. Li, S. Ikeda, K. Kim, and H. Nagura, "Granular thin films with high RF permeability," IEEE Transactions on Magnetics, vol. 39, no. 5, pp. 3052-3056, 2003.
7. C. Sullivan, "Integrating magnetics for on-chip power: Challenges and opportunities," in IEEE Custom Integrated Circuits Conference, 2009, pp. 291-298.
8. D. Perreault, J. Hu, J. M. Rivas, Y. Han, O. Leitermann, R. C. N. Pilawa-Podgurski, A. Sagneri, and C. Sullivan, "Opportunities and Challenges in Very High Frequency Power Conversion," in 24th Annual IEEE Applied Power Electronics Conference and Exposition. Ieee, Feb. 2009, pp. 1-14.
9. Y. Sun, C. Sullivan, W. Li, D. Kopp, F. Johnson, and S. Taylor, "Soft Magnetic Properties of Obliquely Deposited Co-Zr-O Films," IEEE Transactions on Magnetics, vol. 43, no. 12, pp. 4060-4063, Dec. 2007.
10. C. Mehas, K. Coonley, and C. Sullivan, "Converter and inductor design for fast-response microprocessor power delivery," IEEE 31st Annual Power Electronics Specialists Conference, vol. 3, pp. 1621-1626, 2000.
11. D. Yao and C. Sullivan, "Effect of capacitance on eddy-current loss in multi-layer magnetic films for MHz magnetic components," in 1st IEEE Energy Conversion Congress and Exposition, Sep. 2009, pp. 1025-1031.
12. Yao D.Sullivan C.Calculation of eddy-current loss in multilayer magnetic films considering displacement currentJournal of Applied Physics 2009 105 7 07A335:1-3
13. Yao D. Sullivan C. Optimization of v-groove inductors using multilayer co-zr-o thin films for 10 mhz to 100 mhz dc-dc converters Control and Modeling for Power Electronics (COMPEL), 2010 IEEE 12th Workshop on 2010 1-5 Jun
14. J.-P. Vandelac and P. Ziogas, "A novel approach for minimizing high-frequency transformer copper losses," IEEE Transactions on Power Electronics, vol. 3, no. 3, pp. 266-277, Jul. 1988.
15. J. Spreen, "Electrical terminal representation of conductor loss in transformers," IEEE Transactions on Power Electronics, vol. 5, no. 4, pp. 424-429, 1990.
16. P. Dhagat, S. Prabhakaran, and C. Sullivan, "Comparison of Magnetic Materials for V-Groove Inductors in Optimized High-Frequency DC-DC Converters," IEEE Transactions on Magnetics, vol. 40, no. 4, pp. 2008-2010, Jul. 2004.
17. D. Yao, C. Levey, and C. Sullivan, "Microfabricated V-groove power inductors using multilayer Co-Zr-O thin films for very-highfrequency DC-DC converters," in Energy Conversion Congress and Exposition (ECCE), 2011 IEEE, 2011, pp. 1845-1852.
18. B. Puers andW. Sansen, "Compensation structures for convex corner micromachining in silicon," Sensors and Actuators, vol. 23, no. 1-3, pp. 1036-1041, Apr. 1990.
19. H. Seidel, "Anisotropic Etching of Crystalline Silicon in Alkaline Solutions," Journal of The Electrochemical Society, vol. 137, no. 11, pp. 3612-3626, 1990.
20. J. Chen, L. Liu, Z. Li, Z. Tan, Q. Jiang, H. Fang, Y. Xu, and Y. Liu, "Study of anisotropic etching of ( 1 0 0 ) Si with ultrasonic agitation," Sensors And Actuators, vol. 96, pp. 152-156, 2002.