Review of on-chip inductor structures with magnetic films

IEEE Transactions on Magnetics

Volumn 45, Issue 10, 2009, Pages 4760-4766

  Gardner, Donald S ^a   Schrom, Gerhard ^b   Paillet, Fabrice ^b   Jamieson, Brice ^c   Karnik, Tanay ^b   Borkar, Shekhar ^b  

^a INTEL RESEARCH   (United States)

^b INTEL CORPORATION   (United States)

^c UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Amorphous magnetic films; Inductors; Permeability; Soft magnetic materials; Thin film inductors

Indexed keywords

C (PROGRAMMING LANGUAGE); COBALT ALLOYS; COPPER; ECONOMIC AND SOCIAL EFFECTS; EDDY CURRENTS; INDUCTANCE; MAGNETIC DEVICES; MAGNETIC FILMS; MAGNETIC THICK FILMS; MECHANICAL PERMEABILITY; SATURATION MAGNETIZATION; SOFT MAGNETIC MATERIALS; TANTALUM ALLOYS; TERNARY ALLOYS; THIN FILMS; ZIRCALOY;

AMORPHOUS MAGNETIC FILMS; COPPER METALLIZATION; HIGH PERMEABILITY; HIGH-SATURATION MAGNETIZATION; HIGHER FREQUENCIES; INDUCTANCE DENSITIES; SILICON TECHNOLOGIES; THIN FILM INDUCTORS;

ELECTRIC INDUCTORS;

EID: 71049174581     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2030590     Document Type: Article

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