Microfabricated V-groove power inductors for high-current low-voltage fast-transient DC-DC converters

PESC Record - IEEE Annual Power Electronics Specialists Conference

Volumn 2005, Issue , 2005, Pages 1513-1519

  Prabhakaran, Satish ^a   Sun, Yuqin ^a   Dhagat, Parul ^a   Li, Wei Dong ^a   Sullivan, Charles R ^a  

^a DARTMOUTH COLLEGE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DC-DC CONVERTERS; ELECTRIC POTENTIAL; MICROPROCESSOR CHIPS; SILICON; SUBSTRATES; TRANSIENT ANALYSIS;

COPPER CONDUCTORS; FAST TRANSIENT RESPONSE; HIGH CURRENTS; LOW VOLTAGES;

POWER INDUCTORS;

EID: 33847693857     PISSN: 02759306     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PESC.2005.1581831     Document Type: Conference Paper

References (32)

1. E.-J. Yun, M. Jung, C. I. Cheon, and H. G. Nam, Microfabrication and characteristics of low-power high-performance magnetic thin- 1m transformers, IEEE Transactions on Magnetics, vol. 40, no. 1, pp. 65-70, 2004.
2. J.-W. Park, F. Cros, and M. G. Allen, Planar Spiral Inductors With Multilayer Micrometer-Scale Laminated Cores for Compact-Packaging Power Converter Applications, IEEE Transactions on Magnetics, vol. 40, no. 4, 2004.
3. S. Musunuri, P. Chapman, and C. L. J. Zou, Inductor Design for Monolithic DC-DC Converters, in PESC03, vol. 1, pp. 227-232, 2003.
4. M. Brunet, T. O'Donnell, L. Baud, N. Wang, J. O'Brien, P. McCloskey, and S. C. O'Mathuna, Electrical Performance of Microtransformers for DC-DC Converter Applications, TOM, vol. 38, no. 5, pp. 3174-3176, 2002.
5. A. S. and G. Salmer, Ultrahigh frequency DC-to-DC converters using GaAs power switches, IEEE Trans. on Power Electronics, vol. 16, no. 5, pp. 594-602, 2001.
6. V. Korenivski and R. B. van Dover, Design of High Frequency Inductors Based on Magnetic Films, IEEE Transactions on Magnetics, vol. 34, no. 4, pp. 1375-1377, 1998.
7. M. Xy, T. M. Liakopoulos, C. H. Ahn, S. H. Han, and H. J. Kim, A Microfabricated Transformer for High-Frequency Power or Signal Conversion, IEEE Transactions on Magnetics, vol. 34, no. 4, pp. 1369-1371, 1998.
8. M. Mino, K. Tsukamoto, K. Yanagisawa, A. Tago, and T. Yachi, A compact buck-converter using a thin- 1m inductor, in Proceedings of Applied Power Electronics Conference, APEC'96, pp. 422-6, Mar. 1996.
9. C. R. Sullivan and S. R. Sanders, Measured Performance of a High-Power-Density Microfabricated Transformer in a DC-DC Converter, in 27th Annual Power Electronics Specialists Conf, vol. 1, pp. 287-294, June 1996.
10. K. H. Kim, J. Kim, H. J. Kim, S. H. Han, and H. J. Kim, A Megahertz Switching DC/DC Converter Using FeBN Thin Film Inductor, IEEE Transactions on Magnetics, vol. 38, no. 05, pp. 3162-3164, 2002.
11. M. Edo, M. Gekinozu, Z. Hayashi, Y. Katayama, K. Kuroki, K. Matsuzaki, H. Nakazawa, S. Sugahara, and E. Yonezawa, Micro DC-DC converter that integrates planar inductor on power IC, IEEE Transactions on Magnetics, vol. 36, no. 5, pp. 3518-3521, 2000.
12. E. Sugawara, N. Wako, F. Sato, H. Matsuki, M. Yamaguchi, K. Shirakawa, and T. Masumoto, Microinductor for Flip-Chip Micropower Source, IEEE Transactions on Magnetics, vol. 39, no. 05, 2003.
13. Z. Hayashi, Y. Katayama, M. Edo, and H. Nishio, High-efcienc y DC-DC converter chip size module with integrated soft ferrite, IEEE Transactions on Magnetics, vol. 39, no. 05, 2003.
14. F. Sato, T. Ono, N. Wako, S. Arai, T. Ichinose, Y. Oba, S. Kanno, E. Sugawara, M. Yamaguchi, and H. Matsuki, All-in-One Package Ultracompact Micropower Module Using Thin-Film Inductor, IEEE Transactions on Magnetics, vol. 40, no. 4, pp. 2029-2031, 2004.
15. G. Schrom, P. Hazucha, H. Jae-Hong, V. Kursun, D. Gardner, S. Narendra, T. Karnik, and V. De, Feasibility of monolithic and 3D-stacked DC-DC converters for microprocessors in 90nm technology generation, in Symposium on VLSI Circuits, 2004, pp. 256-257, 2004.
16. S. Prabhakaran, C. Sullivan, T. ODonnell, M. Brunet, and S. Roy, Microfabricated Coupled Inductors for DC-DC Converters for Micro-processor Power Delivery, in PESC04, 2004.
17. EN5330 iPOWER™ Voltage Mode Synchronous Buck PWM DC-DC Converter Datasheet, http://www.enpirion.com/, 24 Dec 2004.
18. B. Rose, Voltage regulator technology requirements, in 4th Annual Intel technology Symposium, Sept. 1990.
19. S. Prabhakaran, C. Sullivan, and K. Venkatachalam, Measured Electrical Performance of V-Groove Inductors for Microprocessor Power Delivery, IEEE Transactions on Magnetics, vol. 39, no. 5, pp. 3190-3192, 2003.
20. Y. Shimada, M. Yamaguchi, S. Ohnuma, T. Itoh, W. Li, S. Ikeda, K. Kim, and H. Nagura, Granular lms with high permeability, IEEE Transactions on Magnetics, vol. 39, pp. 3052-3056, September 2003.
21. S. Ohnuma, H. J. Lee, N. Kobayashi, H. Fujimori, and T. Masumoto, Co-Zr-O Nano-Granular Thin Films with Improved High Frequency Soft Magnetic Properties, IEEE Transactions on Magnetics, vol. 37, pp. 3759-3761, July 2001.
22. Y. Hayakawa, A. Makino, H. Fujimori, and A. Inoue, High resistive nanocrystalline Fe-M-O (M-Hf, Zr, rare-earth metals) soft magnetic lms for high-frequency applications (invited), J. Appl. Phys., vol. 81, no. 8, pp. 3747-3763, 1997.
23. P. Dhagat, S. Prabhakaran, and C. Sullivan, Comparison of Magnetic Materials for V-Groove Inductors in Optimized High-Frequency DC-DC Converters, IEEE Transactions on Magnetics, vol. 40, no. 4, pp. 2008 -2010, 2004.
24. G. J. Mehas, K. D. Coonley, and C. R. Sullivan, Design of microfabricated inductors for microprocessor power delivery, in IEEE Applied Power Electronics Conference, Mar. 1999.
25. G. J. Mehas, K. D. Coonley, and C. R. Sullivan, Converter and inductor design for fast-response microprocessor power delivery, in 31st IEEE Annual Power Electronics Specialists Conference., June 2000.
26. Predictive Technology Model, http://www-device.eecs.berkeley.edu/~ptm/, Manual, 2003.
27. L. C. Hu, Silicon and beyond advanced device models and circuit simulators, chapter 1, pages 1-31, World Scientific Publishing Co., 2000.
28. S. Prabhakaran, Microfabrication of Magnetic Components for High Frequency DC-DC Power Conversion at High Currents and Low Voltages. PhD thesis, Dartmouth College, 2005.
29. S. Prabhakaran, C. R. Sullivan, and C. G. Levey, Fabrication of Thin-Film V-Groove Inductors Using Composite Magnetic Materials, in Advanced Technology Workshop on Integrated Power Passives, June 2002.
30. S. Prabhakaran and C. R. Sullivan, Impedance-Analyzer Measurements of High Frequency Power Passives: Techniques for High Power and Low Impedance, in IEEE Industry Applications Society Annual Meeting, Oct. 2002.
31. P. Zou, W. Yu, and J. A. Bain, Inuence of Stress and Texture on Soft Magnetic Properties of Thin Films, IEEE Transactions on Magnetics, vol. 38, pp. 3501-3520, Sept. 2002.
32. Y. Sun, W. Li, P. Dhagat, and C. R. Sullivan, Perpendicular magnetic anisotropy in granular co-zr-o lms, in Proceedings of the 2004 MMM Conference, 2004.