Microstructure, morphology and properties of titanium containing graphite-like carbon films deposited by unbalanced magnetron sputtering

Tribology Letters

Volumn 49, Issue 1, 2013, Pages 47-59

  Chen, Jianmin ^a   Wang, Yongjun ^a,b   Li, Hongxuan ^a   Ji, Li ^a   Wu, Yanxia ^a,b   Lv, Yanhong ^a,b   Liu, Xiaohong ^a   Fu, Yingying ^a,b   Zhou, Huidi ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Graphite like carbon; Magnetron sputtering; Microstructure; Properties; Titanium carbides

Indexed keywords

CHARACTERIZATION TECHNIQUES; GRAPHITE-LIKE CARBON FILMS; GRAPHITE-LIKE CARBONS; LOAD-BEARING CAPACITY; LOW FRICTION; MICROSTRUCTURE AND PROPERTIES; PROPERTIES; SILICON WAFER SUBSTRATES; TITANIUM CONTAINING; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING; UNBALANCED MAGNETRON SPUTTERING SYSTEMS; WEAR RATES;

BIAS VOLTAGE; DEPOSITS; FRICTION; GRAPHITE; HARDNESS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PARAFFINS; SILICON WAFERS; TITANIUM; TITANIUM CARBIDE; TRIBOLOGY;

CARBON FILMS;

EID: 84874494437     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-012-0041-6     Document Type: Article

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