Nonlinear modeling and decoupling control of XY micropositioning stages with piezoelectric actuators

IEEE/ASME Transactions on Mechatronics

Volumn 18, Issue 3, 2013, Pages 821-832

  Xie, Yangqiu ^a,b   Tan, Yonghong ^a   Dong, Ruili ^a  

^a SHANGHAI NORMAL UNIVERSITY   (China)

^b XIDIAN UNIVERSITY   (China)

Author keywords

Decoupling control; expanded input space; hysteresis; micropositioning stage; neural network; sandwich system

Indexed keywords

DECOUPLING CONTROLS; INPUT AND OUTPUTS; INPUT SPACE; MICRO POSITIONING; MOTION BEHAVIOR; NONLINEAR DECOUPLING; NONLINEAR MODELING; REFERENCE TRAJECTORIES; ROBUST DESIGN METHODS; SANDWICH MODEL; SANDWICH SYSTEM; SUBMODELS; TRACKING CONTROLS;

HYSTERESIS; NAVIGATION; NEURAL NETWORKS;

PIEZOELECTRIC ACTUATORS;

EID: 84872968179     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2012.2187794     Document Type: Article

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