Development and assessment of a novel decoupled XY parallel micropositioning platform

IEEE/ASME Transactions on Mechatronics

Volumn 15, Issue 1, 2010, Pages 125-135

  Li, Yangmin ^a   Xu, Qingsong ^a  

^a UNIVERSITY OF MACAU   (Macao)

Author keywords

Flexure mechanism; Micromanipulator; Motion control; Parallel mechanism; Piezoelectric actuation; System identification

Indexed keywords

FINITE ELEMENT METHOD; IDENTIFICATION (CONTROL SYSTEMS); MECHANISMS; MICROMANIPULATORS; MOTION CONTROL; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; RELIGIOUS BUILDINGS;

FLEXURE MECHANISM; OUTPUT CONTROLLERS; PARALLEL MECHANISMS; PERFORMANCE ASSESSMENT; PIEZOELECTRIC ACTUATION; POSITIONING PERFORMANCE; SUBMICROMETER ACCURACY; ZERO PHASE ERROR TRACKING CONTROLLERS;

CONTROLLERS;

EID: 70549087778     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2009.2019956     Document Type: Article

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