Using a walking piezo actuator to drive and control a high-precision stage

IEEE/ASME Transactions on Mechatronics

Volumn 14, Issue 1, 2009, Pages 21-31

  Merry, Roel J E ^a   de Kleijn, Niels C T ^a   van de Molengraft, Marinus J G ^a   Steinbuch, Maarten ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Control engineering; Mechanical systems; Motion control; Piezoelectric transducers

Indexed keywords

ACOUSTOOPTICAL EFFECTS; CANTILEVER BEAMS; FEEDFORWARD CONTROL; MECHANICS; MECHATRONICS; MOTION CONTROL; MOTION PLANNING; MOTORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; REAL TIME SYSTEMS;

CONSTANT VELOCITIES; CONTROL ENGINEERING; CONTROL STRATEGIES; ENCODER RESOLUTIONS; GAIN-SCHEDULING; HIGH PRECISION; MECHANICAL SYSTEMS; MICRO-POSITIONING; NANOMETER RESOLUTIONS; NON-RESONANT; PIEZO ACTUATORS; PIEZO MOTORS; POSITIONING ACCURACIES; STATIC ERRORS; TRACKING ERRORS;

PIEZOELECTRIC ACTUATORS;

EID: 61549101453     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2008.2006756     Document Type: Article

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