Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering

Surface and Coatings Technology

Volumn 216, Issue , 2013, Pages 251-258

  Lin, Jianliang ^a   Wang, Bo ^a   Ou, Yixiang ^a   Sproul, William D ^a,b   Dahan, Isaac ^c   Moore, John J ^a  

^a Department of Metallurgical and Materials Engineering   (United States)

^b Reactive Sputtering INC   (United States)

^c NUCLEAR RESEARCH CENTER NEGEV   (Israel)

Author keywords

Corrosion; CrSiN coating; High power pulsed magnetron sputtering (HPPMS); Modulated pulsed power magnetron sputtering (MPPMS); Nanocomposite coating

Indexed keywords

AISI-304 STAINLESS STEEL; AMORPHOUS SI; CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEMS; COSPUTTERING; H/E RATIO; HIGH POWER PULSED MAGNETRON SPUTTERING (HPPMS); HIGH-IONIZATION; MAXIMUM HARDNESS; MODULATED PULSED POWER MAGNETRON SPUTTERING (MPP); NACL AQUEOUS SOLUTION; NANO-COMPOSITE COATING; NANO-COMPOSITE STRUCTURE; PULSED DC MAGNETRON SPUTTERING; PULSED-POWER; ROOM TEMPERATURE; SI ATOMS; SI CONTENT; SOLID SOLUTION STRENGTHENING; SPUTTERED MATERIALS; STRUCTURE AND PROPERTIES; WEAR-RESISTANT APPLICATIONS;

AMORPHOUS SILICON; CORROSION; CORROSION RESISTANCE; DEPOSITS; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; PHASE SEPARATION; PLASMA DENSITY; SILICON; SODIUM CHLORIDE; SOLID SOLUTIONS;

CHROMATE COATINGS;

EID: 84872943350     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2012.11.053     Document Type: Article

References (35)

1. Veprek S., Haussmann M., Reiprich S. J. Vac. Sci. Technol. A 1996, 14:46.
2. Musil J. Surf. Coat. Technol. 2000, 125:322.
3. Lin J., Moore J.J., Moerbe W.C., Pinkas M., Mishra B., Doll G.L., Sproul W.D. Int. J. Refract. Met. Hard Mater. 2009, 28(1):2.
4. Kim J.W., Kim K.H., Lee D.B., Moore J.J. Surf. Coat. Technol. 2006, 200:6702.
5. Bousser E., Benkahoul M., Martinu L., Klemberg-Sapieha J.E. Surf. Coat. Technol. 2008, 203:776.
6. Benkahoul M., Robin P., Martinu L., Klemberg-Sapieha J.E. Surf. Coat. Technol. 2009, 203:934.
7. Wang Q.M., Kim K.H. Acta Mater. 2009, 57:4974.
8. Martinez E., Sanjines R., Karimi A., Esteve J., Levy F. Surf. Coat. Technol. 2004, 180-181:570.
9. Lee H.Y., Jung W.S., Han J.G., Seo S.M., Kim J.H., Bae Y.H. Surf. Coat. Technol. 2005, 200:1026.
10. Mercs D., Bonasso N., Naamane S., Bordes J.-M., Coddet C. Surf. Coat. Technol. 2005, 200:403.
11. Castaldi L., Kurapov D., Reiter A., Shklover V., Schwaller P., Patscheder J. Surf. Coat. Technol. 2007, 202:781.
12. Mercs D., Briois P., Demange V., Lamy S., Coddet C. Surf. Coat. Technol. 2007, 201:6970.
13. Shin S.H., Kim M.W., Kang M.C., Kim K.H., Kwon D.H., Kim J.S. Surf. Coat. Technol. 2008, 202:5613.
14. Procházka J., Karvánková P., Vepřek-Heijman M.G.J., Vepřek S. Mater. Sci. Eng., A 2004, 384:102.
15. Veprek S., Veprek-Heijiman M.G.J., Karvankova P., Prochazka J. Thin Solid Films 2005, 476:1.
16. Kouznetsov V., Macák K., Schneider J.M., Helmersson U., Petrov I. Surf. Coat. Technol. 1999, 122:290.
17. Chistyakov R., Abraham B., Sproul W.D. Proceedings of the 49th Annual SVC Technical Conference, Washington, DC, April 23-27 2006, 88.
18. Lin J., Sproul W.D., Moore J.J., Wu Z.L., Lee S.L., Chistyakov R., Abraham B. JOM June 2011, 63(6):48.
19. Lin J., Moore J.J., Sproul W.D., Mishra B., Rees J.A., Wu Z., Chistyakov R., Abraham B. Surf. Coat. Technol. 2009, 203:3676.
20. Lin J., Sproul W.D., Moore J.J. J. Vac. Sci. Technol. A 2011, 29(6):061301.
21. Lin J., Sproul W.D., Moore J.J., Lee S. Surf. Coat. Technol. 2011, 205:3226.
22. Meng L., Cloud A.N., Jung S., Ruzic D.N. J. Vac. Sci. Technol. A 2011, 29(1):011024-1.
23. Liebig B., St N., Braithwaite J., Kelly P.J., Chistyakov R., Abraham B., Bradley J.W. Surf. Coat. Technol. 2011, 205:S312.
24. Veprek S. Thin Solid Films 1998, 317:449.
25. Lin J., Mishra B., Moore J.J., Sproul W.D., Rees J.A. Surf. Coat. Technol. 2007, 201:6960.
26. Sproul W.D., Rudnik P.J., Graham M.E., Rohde S.L. Surf. Coat. Technol. 1990, 43:270.
27. NIST X-ray Photoelectron Spectroscopy Database, . http://srdata.nist.gov/xps/.
28. Zou C.W., Wang H.J., Li M., Yu Y.F., Liu C.S., Guo L.P., Fu D.J. J. Alloys Compd. 2009, 485:236.
29. Zhang G.G., Wang L.P., Wang S.C., Yan P.X., Xue Q.J. Appl. Surf. Sci. 2009, 255:4425.
30. Koehler J.S. Phys. Rev. B 1970, 2:547.
31. Matthews A., Franklin S., Holmberg K. J. Phys. D: Appl. Phys. 2007, 40:5463.
32. Musil J., Jirout M. Surf. Coat. Technol. 2007, 201:5148.
33. Yoo Y.H., Hong J.H., Kim J.G., Lee H.Y., Han J.G. Surf. Coat. Technol. 2007, 201:9518.
34. Benkahoul M., Robin P., Gujrathi S.C., Martinu L., Klemberg-Sapieha J.E. Surf. Coat. Technol. 2008, 202:3975.
35. Kim G.-S., Kim B.-S., Lee S.-Y. Surf. Coat. Technol. 2005, 200:1814.