Structure and mechanical properties of reactive sputtering CrSiN films

Applied Surface Science

Volumn 255, Issue 8, 2009, Pages 4425-4429

  Zhang, Guangan ^a,b   Wang, Liping ^a   Wang, S C ^c   Yan, Pengxun ^b   Xue, Qunji ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b LANZHOU UNIVERSITY   (China)

^c UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

CrSiN films; Magnetron sputtering; Mechanical properties; Microstructure

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CHROMIUM COMPOUNDS; GLASS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MICROSTRUCTURE; REACTIVE SPUTTERING; SILICON;

COLUMNAR STRUCTURES; COMPARATIVE STUDIES; CRYSTALLINE-TO-AMORPHOUS; GRANULAR STRUCTURESS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; REACTIVE GAS MIXTURES; REACTIVE MAGNETRON SPUTTERING; SILICON CONTENTS;

NITROGEN COMPOUNDS;

EID: 58349088970     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.11.036     Document Type: Article

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