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Volumn 485, Issue 1-2, 2009, Pages 236-240

Microstructure and mechanical properties of Cr-Si-N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

(7) Zou, C W a Wang, H J a Li, M a Yu, Y F a Liu, C S a Guo, L P a Fu, D J a

a WUHAN UNIVERSITY (China)

Author keywords

Cathodic arc; Cr Si N coatings; Hardness; Microstructure; Middle frequency magnetron sputtering

Indexed keywords

CATHODIC ARC; CR-SI-N COATINGS; ENERGY DISPERSIVE; FRICTION MEASUREMENTS; INDUSTRIAL SCALE; MAGNETRON SPUTTERING SYSTEMS; MAXIMUM HARDNESS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; NANO-COMPOSITE COATING; NANOINDENTATION TECHNIQUES; SI CONTENT;

CAVITY RESONATORS; CHROMIUM; HARDNESS; INDUSTRIAL APPLICATIONS; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; MICROCRYSTALLINE SILICON; MICROSTRUCTURE; NANOCOMPOSITES; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

CHROMATE COATINGS;

EID: 72149099306 PISSN: 09258388 EISSN: None Source Type: Journal
DOI: 10.1016/j.jallcom.2009.06.055 Document Type: Article

Times cited : (19)

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