Atomic-scale characterization of germanium isotopic multilayers by atom probe tomography

Journal of Applied Physics

Volumn 113, Issue 2, 2013, Pages

  Shimizu, Y ^a   Takamizawa, H ^a   Kawamura, Y ^b   Uematsu, M ^b   Toyama, T ^a   Inoue, K ^a   Haller, E E ^c   Itoh, K M ^b   Nagai, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b KEIO UNIVERSITY   (Japan)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADJACENT LAYERS; ATOM-PROBE TOMOGRAPHY; ATOMIC SCALE; DEGREE OF INTERMIXING; GE(100); ISOTOPICALLY ENRICHED; LASER-ASSISTED; MASS SPECTRA;

ISOTOPES; MOLECULAR BEAM EPITAXY; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY;

GERMANIUM;

EID: 84872708282     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4773675     Document Type: Article

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