Local electrode atom probes

Materials Characterization

Volumn 44, Issue 1-2, 2000, Pages 59-85

  Kelly, Thomas F ^a   Larson, David J ^b  

^a 53706 ^*  (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRIC INSULATING MATERIALS; ELECTRIC POTENTIAL; ELECTRODES; ETCHING; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SILICON; SPUTTERING; STRUCTURE (COMPOSITION); SUBSTRATES; SURFACES;

FOCUSED ION BEAM MILLING; LOCAL ELECTRODE ATOM PROBES; LOW EXTRACTION VOLTAGES;

ION MICROSCOPES;

EID: 0033907576     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1044-5803(99)00055-8     Document Type: Article

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