Ultraviolet-laser atom-probe tomographic three-dimensional atom-by-atom mapping of isotopically modulated Si nanoscopic layers

Applied Physics Letters

Volumn 98, Issue 1, 2011, Pages

  Moutanabbir, Oussama ^a   Isheim, Dieter ^b   Seidman, David N ^b   Kawamura, Yoko ^c   Itoh, Kohei M ^c  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b Northwestern University   (United States)

^c KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

3-D IMAGE; ATOM PROBE TOMOGRAPHY; INTERFACIAL WIDTH; ION MASS; LASER-ASSISTED; NANO-MATERIALS; SUBNANOMETERS; THREE-DIMENSIONAL (3D); TOMOGRAPHIC; ULTRATHIN LAYERS; UV LASER BEAM; VISIBLE LASERS;

ATOMS; ISOTOPES; LASER BEAM EFFECTS; PROBES; TOMOGRAPHY; ULTRAVIOLET LASERS;

THREE DIMENSIONAL;

EID: 78651297063     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3531816     Document Type: Article

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