Correlation between surface stress and apparent young's modulus of top-down silicon nanowires

ACS Nano

Volumn 6, Issue 12, 2012, Pages 10727-10734

  Pennelli, Giovanni ^a   Totaro, Massimo ^a   Nannini, Andrea ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

nanobeam; nanoelasticity; nanoelectromechanical system; nanowire; surface stress

Indexed keywords

AFM TIP; APPLIED FORCES; BULK DEFORMATION; BULK SILICON; ELASTIC BEHAVIOR; EQUILIBRIUM CONDITIONS; EXPERIMENTAL CONFIRMATION; EXPERIMENTAL EVIDENCE; MECHANICAL BI-STABILITY; NANOBEAM; NANOELASTICITY; SILICON NANOSTRUCTURES; SILICON NANOWIRES; SIMPLE PHYSICAL MODELS; SURFACE STRESS; SURFACE STRESS EFFECTS; TOPDOWN; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; BEAMS AND GIRDERS; DEFORMATION; ELASTIC MODULI; ELASTICITY; NANOWIRES; NEMS; SILICON;

SURFACE PROPERTIES;

EID: 84871603301     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn304094b     Document Type: Article

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