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Journal of Non-Crystalline Solids

Volumn 359, Issue 1, 2013, Pages 69-72

Deposition of Al doped ZnO thin films on the different substrates with radio frequency magnetron sputtering

(2) Elmas, Saliha a Korkmaz, Şadan a

a ESKISEHIR OSMANGAZI UNIVERSITY (Turkey)

Author keywords

AFM; AZO thin films; FESEM; Optical properties; XRD

Indexed keywords

AFM; AL DOPED ZNO THIN FILMS; AL-ZN ALLOY; AZO FILMS; AZO THIN FILMS; CRYSTALLOGRAPHIC PROPERTIES; DIFFERENT SUBSTRATES; FESEM; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GAS-MIXING; GLASS SLIDES; OXIDATION PROCESS; RADIO FREQUENCIES; RADIO FREQUENCY MAGNETRON SPUTTERING; REACTIVE MAGNETRON SPUTTERING; UV-VIS SPECTROPHOTOMETRY; XRD;

ATOMIC FORCE MICROSCOPY; FIELD EMISSION MICROSCOPES; MAGNETRON SPUTTERING; OPTICAL FILMS; OPTICAL PROPERTIES; POLYETHYLENE TEREPHTHALATES; REFRACTIVE INDEX; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION; ZINC; ZINC ALLOYS;

ALUMINUM;

EID: 84870018745 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2012.09.024 Document Type: Article

Times cited : (22)

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