Room temperature growth of nanocrystalline anatase TiO2 thin films by dc magnetron sputtering

Physica B: Condensed Matter

Volumn 405, Issue 5, 2010, Pages 1258-1266

  Singh, Preetam ^a   Kaur, Davinder ^a  

^a Centre of Nanotechnology   (India)

Author keywords

DC magnetron sputtering; Nanocrystalline; Oxygen pressure; Room temperature; TiO2

Indexed keywords

DC MAGNETRON SPUTTERING; NANOCRYSTALLINES; OXYGEN PRESSURE; ROOM TEMPERATURE; TIO;

FILM GROWTH; FREE ENERGY; LIGHT REFRACTION; MAGNETRON SPUTTERING; MAGNETRONS; NANOCRYSTALLINE ALLOYS; OPTICAL CONSTANTS; OPTICAL DATA PROCESSING; ORGANIC POLYMERS; OXYGEN; REFRACTIVE INDEX; REFRACTOMETERS; SURFACE CHEMISTRY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; SURFACE TENSION; THIN FILMS; TITANIUM DIOXIDE;

OPTICAL FILMS;

EID: 74849101686     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2009.11.061     Document Type: Article

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