Current-voltage-time characteristics of the reactive Ar/N2 high power impulse magnetron sputtering discharge

Journal of Applied Physics

Volumn 110, Issue 8, 2011, Pages

  Magnus, F ^a   Sveinsson, O B ^a   Olafsson, S ^a   Gudmundsson, J T ^a,b  

^a UNIVERSITY OF ICELAND   (Iceland)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT WAVEFORMS; DISCHARGE CURRENTS; DISCHARGE VOLTAGES; HIGH-POWER; LONG PULSE; LOW FREQUENCY; PULSE REPETITION FREQUENCIES; SECONDARY ELECTRON EMISSIONS; VOLTAGE WAVEFORMS;

NITRIDES; SECONDARY EMISSION;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 80655128785     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3653233     Document Type: Article

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