Structural and optical properties of TiO2 films prepared using reactive RF magnetron sputtering

Journal of the Korean Physical Society

Volumn 41, Issue 1, 2002, Pages 67-71

  Jeong, Sang Hun ^a   Kim, Bong Soo ^a   Lee, Byung Teak ^a   Park, Hyuk Ryul ^b   Kim, Jae Keun ^a  

^a Chonnam National University   (South Korea)

^b Mokpo National University   (South Korea)

Author keywords

Composition; Homogeneity; O2 addition; Refractive index; rf magnetron sputtering; Substrate heating; TiO2 film

Indexed keywords

EID: 0036021576     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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