Structural and optical studies on sol-gel derived ZnO thin films by excimer laser annealing

Ceramics International

Volumn 39, Issue 1, 2013, Pages 469-474

  Tsay, Chien Yie ^a   Wang, Min Chi ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

A. Films; A. Sol gel processes; B. Microstructure final; D. ZnO

Indexed keywords

ABNORMAL GRAIN GROWTH; CRYSTALLINITIES; EXCIMER LASER ANNEALED; EXCIMER LASER ANNEALING; HIGH QUALITY; IRRADIATION ENERGY DENSITY; KRF EXCIMER LASER; LASER ENERGY DENSITY; MICROSTRUCTURE-FINAL; OPTICAL STUDY; POLYCRYSTALLINE ZNO; RMS ROUGHNESS; SOL-GEL SPIN COATING; SOLGEL FILMS; ZNO; ZNO CRYSTALS; ZNO THIN FILM;

CRYSTAL MICROSTRUCTURE; EXCIMER LASERS; GRAIN GROWTH; IRRADIATION; METALLIC FILMS; OPTICAL FILMS; SOL-GEL PROCESS; SOL-GELS; THIN FILMS; ZINC OXIDE;

ANNEALING;

EID: 84869093833     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2012.06.050     Document Type: Article

References (24)

1. S.Y. Park, B.J. Kim, K. Kim, M.S. Kang, K.H. Lim, T.I. Lee, J.M. Myoung, H.K. Baik, J.H. Cho, and Y.S. Kim Low-temperature, solution-processed and alkali metal doped ZnO for high performance thin-film transistors Advanced Materials 24 2012 834 838
2. H. Bong, W.H. Lee, D.Y. Lee, B.J. Kim, J.H. Cho, and K. Cho High mobility low-temperature ZnO transistors with low-voltage operation Applied Physics Letters 96 2010 192115
3. S.S. Shinde, and K.Y. Rajpure Fast response ultraviolet Ga-doped ZnO based photoconductive detector Materials Research Bulletin 46 2011 1734 1737
4. K. Kinoshita, T. Okutani, H. Tanaka, T. Hinoki, H. Agura, K. Yazawa, K. Ohmi, and S. Kishida Flexible and transparent ReRAM with GZO memory layer and GZO-electrodes on large PEN sheet Solid-State Electronics 58 2011 48 53
5. L.M. Wong, S.Y. Chiam, J.Q. Huang, S.J. Wang, W.K. Chim, and J.S. Pan Examining the transparency of gallium-doped zinc oxide for photovoltaic applications Solar Energy Materials and Solar Cells 95 2011 2400 2406
6. J. Eriksson, V. Khranovskyy, F. Söderlind, P.O. Käll, R. Yakimova, and A.L. Spetz ZnO nanoparticles or ZnO films: a comparison of the gas sensing capabilities Sensors and Actuators B: Chemical 137 2009 94 102
7. Y.Q. Fu, J.K. Luo, X.Y. Du, A.J. Flewitt, Y. Li, G.H. Markx, A.J. Walton, and W.I. Milne Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review Sensors and Actuators B: Chemical 143 2010 606 619
8. N. Yamamoto, H. Makino, S. Osone, A. Ujihara, T. Ito, H. Hokari, T. Maruyama, and T. Yamamoto Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels Thin Solid Films 520 2012 4131 4138
9. K. Song, J. Noh, T. Jun, Y. Jung, H.Y. Kang, and J. Moon Fully flexible solution-deposited ZnO thin-film transistors Advanced Materials 22 2010 4308 4312
10. M.G. Kim, M.G. Kanatzidis, A. Facchetti, and T.J. Marks Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing Nature Materials 10 2011 382 388
11. Y.H. Yang, S.S. Yang, and K.S. Chou Performance improvements of IGZO and ZnO thin-film transistors by laser-irradiation treatment Journal of the Society for Information Display 19 2011 247 252
12. T. Nagase, T. Ooie, and J. Sakakibara A novel approach to prepare zinc oxide films: excimer laser irradiation of sol-gel derived precursor films Thin Solid Films 357 1999 151 158
13. D. Bao, H. Gu, and A. Kuang Sol-gel derived c-axis oriented ZnO thin films Thin Solid Films 312 1998 37 39
14. Y. Zhao, and Y. Jiang Effect of KrF excimer laser irradiation on the properties of ZnO thin films Journal of Applied Physics 103 2008 114903
15. 4 thin film transistors characteristics utilizing excimer laser annealing Applied Physics Express 2 2009 021102
16. J.J Kim, J.Y. Bak, J.H. Lee, H.S. Kim, N.W. Jang, Y. Yun, and W.J. Lee Characteristics of laser-annealed ZnO thin film transistors Thin Solid Films 518 2010 3022 3025
17. T. Nagase, T. Ooie, Y. Makita, M. Nakatsuka, K. Shinozaki, and N. Mizutani A novel method for the preparation of green photoluminescent undoped zinc oxide film involving excimer laser irradiation of a sol-gel derived precursor Japanese Journal of Applied Physics 39 2000 L713 L715
18. W.M. Tsang, F.L. Wong, M.K. Fung, J.C. Chang, C.S. Lee, and S.T. Lee Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment Thin Solid Films 517 2008 891 895
19. K. Kim, S. Kim, and S.Y. Lee Effect of excimer laser annealing on the properties of ZnO thin film prepared by sol-gel method Current Applied Physics 12 2012 585 588
20. H.C. Cheng, C.F. Chen, C.Y. Tsay, and J.P. Leu High oriented ZnO films by sol-gel and chemical bath deposition combination method Journal of Alloys and Compounds 475 2009 L46 L49
21. D.P. Norton, Y.W. Heo, M.P. Ivill, K. Ip, S.J. Pearton, M.F. Chisholm, and T. Steiner ZnO: growth, doping and processing Materials Today 7 2004 34 40
22. xO films prepared by the sol-gel process and their application for thin-film transistors Journal of Electronic Materials 38 2009 1962 1968
23. Y. Caglar, M. Caglar, and S. Ilican Microstructural, optical and electrical studies on sol-gel derived ZnO and ZnO:Al films Current Applied Physics 12 2012 963 968
24. K.H. Kim, K.C. Park, and D.Y. Ma Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering Journal of Applied Physics 81 1997 7764 7772