Development of Ga-doped ZnO transparent electrodes for liquid crystal display panels

Thin Solid Films

Volumn 520, Issue 12, 2012, Pages 4131-4138

  Yamamoto, N ^a   Makino, H ^a   Osone, S ^a   Ujihara, A ^b   Ito, T ^b   Hokari, H ^c   Maruyama, T ^d   Yamamoto, T ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b Geomatec Co Ltd   (Japan)

^c Electronic Device Division   (Japan)

^d MITSUBISHI GAS CHEMICAL COMPANY INC   (Japan)

Author keywords

Alkaline TMAH developer; Etchant; Fine pattern; Ga doped ZnO transparent electrode; LCD display TV set; Liquid crystal display; Photoresist stripper; Wet chemical etching

Indexed keywords

ALKALINE TMAH DEVELOPER; ETCHANT; FINE PATTERN; GA-DOPED ZNO; LCD-DISPLAY TV SET; WET-CHEMICAL ETCHING;

ALKALINITY; ELECTRODES; GALLIUM; INDIUM COMPOUNDS; LIQUID CRYSTALS; LITHOGRAPHY; PHOTORESISTS; THIN FILM TRANSISTORS; TIN; TIN OXIDES; WET ETCHING; ZINC OXIDE;

LIQUID CRYSTAL DISPLAYS;

EID: 84858699983     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.04.067     Document Type: Conference Paper

References (5)

1. D. Kempthorne, and M.D. Myers January 12 2007 United States Government Printing Office Washington 78
2. T. Homma, T. Ueno, K. Sekizawa, A. Tanaka, and M. Hirata J. Occup. Health 45 2003 137
3. T. Yamamoto, T. Yamada, A. Miyake, H. Makino, and N. Yamamoto J. SID 16 2008 713
4. N. Yamamoto, H. Makino, T. Yamada, Y. Hirashima, H. Iwaoka, T. Ito, A. Ujihara, H. Hokari, H. Morita, and T. Yamamoto J. Electrochem. Soc. 157 2010 J13
5. N. Yamamoto, T. Yamada, A. Miyake, H. Makino, S. Kishimoto, and T. Yamamoto Proceedings of ICCG-7 5-18 June 15-19 2008 Eindhoven/Veldhoven-The Netherlands