Improvement of InGaZnO4 thin film transistors characteristics utilizing excimer laser annealing

Applied Physics Express

Volumn 2, Issue 2, 2009, Pages

  Nakata, Mitsuru ^a,b   Takechi, Kazushige ^a   Azuma, Kazufumi ^a   Tokumitsu, Eisuke ^b   Yamaguchi, Hirotaka ^c   Kaneko, Setsuo ^c  

^a Technology Research Association for Advanced Display Materials TRADIM   (Japan)

^b Tokyo Institute of Technology ^*  (Japan)

^c NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; GAS LASERS; LASERS; THIN FILM DEVICES; TRANSISTORS;

EXCIMER; EXCIMER LASER ANNEALING; FURNACE ANNEALING; ORDER OF MAGNITUDES; PLASTIC SUBSTRATES; ROOM TEMPERATURES; THERMAL DAMAGES;

THIN FILM TRANSISTORS;

EID: 60349115985     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.2.021102     Document Type: Article

References (13)

1. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono: Nature 432 (2004) 488.
2. H. Hosono: J. Non-Cryst. Solids 352 (2006) 851.
3. K. Nomura, A. Takagi, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono: Jpn. J. Appl. Phys. 45 (2006) 4303.
4. M. Ito, M. Kon, T. Okubo, M. Ishizaki, and N. Sekine: Proc. 12th Int. Display Workshops in conjunction with Asia Display, 2005, p. 845.
5. H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, and H. Kumomi: Appl. Phys. Lett. 89 (2006) 112123.
6. K. Abe, H. Kumomi, K. Nomura, T. Kamiya, M. Hirano, and H. Hosono: Proc. 14th Int. Display Workshops, 2007, p. 1779.
7. Y. Park, C. J. Kim, S. I. Kim, I. Song, J. C. Park, H. Lim, S. W. Kim, and E. Lee: Proc. 14th Int. Display Workshops, 2007, p. 1775.
8. K. Takechi, M. Nakata, T. Eguchi, H. Yamaguchi, and S. Kaneko: Jpn. J. Appl. Phys. 48 (2009) 011301.
9. K. Nomura, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono: Appl. Phys. Lett. 93 (2008) 192107.
10. H. H. Hsieh, T. Kamiya, K. Nomura, H. Hosono, and C. C. Wu: Appl. Phys. Lett. 92 (2008) 133503.
11. M. Kimura, T. Nakanishi, K. Nomura, T. Kamiya, and H. Hosono: Appl. Phys. Lett. 92 (2008) 133512.
12. T. Ito, A. Sugizaki, and T. Eguchi: Proc. 10th Int. Display Workshops, 2003, p. 717.
13. T. Ito, W. Oka, H. Goto, and H. Umeda: Jpn. J. Appl. Phys. 45 (2006) 4325.