Piezoresistive properties and structure of hydrogen-free DLC films deposited by DC and pulsed-DC unbalanced magnetron sputtering

Surface and Coatings Technology

Volumn 211, Issue , 2012, Pages 172-175

  Meškinis, Š ^a   Vasiliauskas, A ^a   Slapikas K ^a   Gudaitis, R ^a   Tamulevicius S ^a   Niaura, G ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Hydrogen free diamond like carbon; Piezoresistance; Pulsed DC magnetron sputtering; Refractive index; Resistance; Structure

Indexed keywords

COMPOSITE MODELS; DIAMOND LIKE CARBON; DLC FILM; GAUGE FACTORS; HYDROGEN-FREE DLC; PIEZORESISTANCE; PIEZORESISTIVE PROPERTIES; PULSE FREQUENCIES; PULSED DC; PULSED DC MAGNETRON SPUTTERING; RAMAN SCATTERING SPECTRA; SUBSTRATE TEMPERATURE; TECHNOLOGICAL CONDITIONS; UNBALANCED MAGNETRON SPUTTERING;

DEPOSITS; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; GAGES; HYDROGEN; MAGNETRON SPUTTERING; REFRACTIVE INDEX; STRUCTURE (COMPOSITION);

COMPOSITE FILMS;

EID: 84868645028     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.10.004     Document Type: Article

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