Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 1171-1175

  Biehl, Saskia ^a   Lüthje, Holger ^a   Bandorf, Ralf ^a   Sick, Jan Hinrich ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Diamond like carbon; Intelligent bearing; Load sensor; Piezoresistivity; Sensor washer

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; NANOSTRUCTURED MATERIALS; SENSORS; TEMPERATURE MEASUREMENT;

LOAD SENSORS; PIEZORESISTIVE SENSORS; PIEZORESISTIVITY; SENSOR WASHERS;

DIAMOND LIKE CARBON FILMS;

EID: 33750443279     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.143     Document Type: Article

References (7)

1. Yamamoto A., and Tsutsumoto T. Diamond and Related Materials 13 (2004) 863
2. Robertson J. Diamond and Related Materials 12 (2003) 79
3. Staryga E., and Bak G.W. Diamond and Related Materials 14 (2005) 23
4. H. Köberle, Structure and electrical conductivity of metal containing carbon-hydrogen layers; Dissertation University Hamburg 1989.
5. Biehl S., and Lüthje H. Proc. Eurosensors XVII, Guimaraes (2003) 564
6. Biehl S., and Lüthje H. Proc. Eurosensors XVIII, Rom (2004) 661
7. H. Lüthje, S. Biehl, R. Bandorf, J.-H. Sick, E. Peiner, A. Tibrewala, 13th Intern. Conf. Sol. St. Sens. Act. (Transducers '05), Seoul, Südkorea, (Dig. Techn. Papers, IEEE, 2005) 2111-2114.