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Volumn 17, Issue 7, 2007, Pages
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The piezoresistive effect in diamond-like carbon films
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CONDUCTIVITY;
MICROMACHINING;
OPTICAL BAND GAPS;
PIEZOELECTRIC DEVICES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
MICROMACHINED SILICON;
PIEZORESISTIVE EFFECTS;
PIEZORESISTIVE GAUGE FACTORS;
TRANSVERSAL STRAIN CONFIGURATIONS;
CARBON FILMS;
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EID: 34547586516
PISSN: 09601317
EISSN: 13616439
Source Type: Journal
DOI: 10.1088/0960-1317/17/7/S03 Document Type: Article |
Times cited : (21)
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References (31)
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