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Volumn 172, Issue 2-3, 2003, Pages 189-193

Effect of deposition and anneal temperature on the resistivity of magnetron sputtered carbon films

Author keywords

Amorphous carbon film; Electrical resistance; Magnetron sputtering; Structure

Indexed keywords

ANISOTROPY; ANNEALING; ELECTRIC CONDUCTIVITY; GRAPHITE; HIGH ENERGY ELECTRON DIFFRACTION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY;

POST-DEPOSITION ANNEALING;

AMORPHOUS FILMS;

CARBON;

EID: 0038115696 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00333-5 Document Type: Article

Times cited : (27)

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