New materials for sputtered strain gauges

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 64-67

  Heckmann, U ^a   Bandorf, R ^a   Gerdes, H ^a   Lubke M ^a   Schnabel, S ^a   Brauer G ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

strain gauge, gauge factor, strain sensitivity, DLC, ITO, TCR

Indexed keywords

COMPENSATED TEMPERATURE; GAUGE FACTORS; MATERIAL DEVELOPMENT; NEW MATERIAL; NICKEL CONTAINING; SEMICONDUCTING MATERIALS; SENSOR MATERIALS; SPUTTERED THIN FILMS; STRAIN GAUGE; STRAIN SENSITIVITY; ZERO-CROSSINGS;

CARBON FILMS; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; ELECTRIC REACTORS; NICKEL; SILVER; STRAIN GAGES;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 71549128979     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.016     Document Type: Conference Paper

References (6)

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