Me-DLC films as material for highly sensitive temperature compensated strain gauges

Diamond and Related Materials

Volumn 20, Issue 5-6, 2011, Pages 814-818

  Petersen, Mirjana ^a   Heckmann, Ulrike ^b   Bandorf, Ralf ^b   Gwozdz, Virginia ^b   Schnabel, Stephan ^b   Bräuer, Günter ^a,b   Klages, Claus Peter ^a,b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Diamond like carbon; Gauge factor; Me DLC; Strain gauge

Indexed keywords

CONVENTIONAL METALS; CONVENTIONAL POLYMERS; DC SPUTTERING; DEPOSITION METHODS; DIAMOND-LIKE CARBON; DIFFERENT PROCESS; DLC FILM; GAUGE FACTORS; HIGHLY SENSITIVE; ME-DLC; METAL CONTENT; METAL-DOPED; NI-CR ALLOYS; POLYMER MATERIALS; RF EXCITATION; RF-SPUTTERING; SENSOR LAYERS; SPECIAL APPLICATIONS; SPUTTERING SYSTEMS; STRAIN GAUGE; STRAIN SENSITIVITY; SUBSTRATE BIAS VOLTAGES; TECHNICAL APPLICATIONS; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE EFFECTS; THERMAL COMPENSATION; WORK PIECE SURFACE; ZERO-CROSSINGS;

CARBON FILMS; DIAMONDS; GLUING; METALS; SEMICONDUCTOR DOPING; SILVER; STRAIN GAGES;

DIAMOND LIKE CARBON FILMS;

EID: 79956106710     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.03.036     Document Type: Article

References (21)

1. K. Bethe, and D. Schön Philips Tech. Rev. 39 1980 94 101
2. M.A. Angadi, and R. Whiting Mater. Sci. Eng. B7 1990 L1 L4
3. A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje, and T. Rabe Appl. Surf. Sci. 252 2006 5387 5390
4. E. Peiner, A. Tibrewala, R. Bandorf, S. Biehl, H. Lüthje, and L. Doering Sens. Actuators A 130-131 2006 75 82
5. E. Peiner, A. Tibrewala, H. Lüthje, R. Bandorf, S. Biehl, and L. Doering XVIII IMEKO World Congress - Metrology for a Sustainable Development, Rio de Janeiro 2006
6. E. Peiner, A. Tibrewala, R. Bandorf, H. Lüthje, L. Doering, and W. Limmer J. Micromech. Microeng. 17 2007 S83 S90
7. R. Bandorf, U. Heckmann, M. Lübke, S. Schnabel, and G. Bräuer Proc. Soc. Vac. Coaters 52 2009 26 30
8. U. Heckmann, R. Bandorf, H. Gerdes, M. Lübke, S. Schnabel, and G. Bräuer Procedia Chemistry 1 2009 64 67
9. D.A. Outka, W.L. Hsu, D.R. Boehme, N.Y.C. Yang, D.K. Ottesen, H.A. Johnsen, T.J. Headley, and W.M. Clift Compilation of Diamond-Like Carbon Properties for Barriers and Hard Coatings, Sandia Report SAND94-8219 1994
10. C. Wang, X. Yu, and M. Hua Appl. Surf. Sci. 256 2009 1431 1435
11. A. Schroeder, G. Francz, A. Bruinink, R. Hauert, J. Mayer, and E. Wintermantel Biomaterials 21 2000 449 456
12. K.I. Schiffmann, M. Fryda, G. Goerigk, R. Lauer, P. Hinze, and A. Bulack Thin Solid Films 347 1999 60 71
13. C. Ruth, and M. Turpin Séances Acad. Sci. C 1967 928 929
14. G. Schultes, R. Koppert, D. Goettel, O. Freitag-Weber, A.C. Probst, and U. Werner Proc. SPIE 7362 2009 73620W-1-73620W-10
15. R. Koppert, D. Goettel, O. Freitag-Weber, and G. Schultes Solid State Sciences 11 2009 1797 1800
16. R. Koppert, D. Goettel, G. Schultes, and U. Werner Technisches Messen 77 2010 631 637
17. A. Tibrewala Piezoresistive Effect in Diamond-Like Carbon Films 2006 CuvillierVerlag Göttingen
18. J. Robertson Mater. Sci. Eng. R37 2002 129 281
19. J.D. Carey, and S.R.P. Silva Phys. Rev. B. 70 2004 235417-1 235417-7
20. M. Huth J. Appl. Phys. 107 2010 113709-1 113709-7
21. K. Bewilogua, R. Wittorf, H. Thomsen, and M. Weber Thin Solid Films 447-448 2004 142 147