A DLC/W-DLC multilayered structure for strain sensing applications

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 713-716

  Takeno, Takanori ^a   Miki, Hiroyuki ^a   Sugawara, Toshifumi ^a   Hoshi, Yuhtaro ^a   Takagi, Toshiyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

DLC; Double layered film; Strain sensor

Indexed keywords

CARBON FILMS; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TUNGSTEN COMPOUNDS;

DC MAGNETRON CO-SPUTTERING; DOUBLE LAYERED FILMS; STRAIN SENSORS;

STRAIN MEASUREMENT;

EID: 42949166879     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.005     Document Type: Article

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