Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics

Journal of Applied Physics

Volumn 112, Issue 8, 2012, Pages

  Bozorg Grayeli, Elah ^a   Li, Zijian ^a   Asheghi, Mehdi ^a   Delgado, Gil ^b   Pokrovsky, Alexander ^b   Panzer, Matthew ^b   Wack, Daniel ^b   Goodson, Kenneth E ^a  

^a Stanford University   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; CRYSTALLINE PHASE; EUV MIRRORS; EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLETS; MO/SI MULTILAYER; NANO-STRUCTURED; OPTICAL COMPONENTS; OUT-OF-PLANE; PHONON TRANSPORT; RADIATION ABSORPTION; RU CAPPING LAYERS; THERMAL ANISOTROPY; THERMAL CONDUCTION; THICKNESS RATIO; TIME DOMAIN THERMOREFLECTANCE;

MULTILAYERS; THERMODYNAMIC PROPERTIES; TIME DOMAIN ANALYSIS;

THERMAL CONDUCTIVITY;

EID: 84868371569     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4759450     Document Type: Article

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