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Thin Solid Films

Volumn 520, Issue 1, 2011, Pages 314-319

Growth and crystallization of molybdenum layers on amorphous silicon

(4) Zubarev, E N a Kondratenko, V V a Pershyn, Yu P a Sevryukova, V A a

a NATIONAL TECHNICAL UNIVERSITY (Ukraine)

Author keywords

Cluster; Crystallization; Interfaces; Transmission electron microscopy

Indexed keywords

AMORPHOUS SILICON (A-SI); CLUSTER; DIRECT CURRENT MAGNETRON SPUTTERING; LAYER THICKNESS; METAL LAYER; NOMINAL THICKNESS; TRANSIENT STATE;

CRYSTALLITES; CRYSTALLIZATION; MOLYBDENUM; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS SILICON;

EID: 80054023208 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.06.056 Document Type: Article

Times cited : (14)

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