Anomalous transport of Sb in laser irradiated Ge

Applied Physics Letters

Volumn 101, Issue 17, 2012, Pages

  Bruno, E ^a   Scapellato, G G ^a   La Magna, A ^b   Cuscuna M ^c   Napolitani, E ^d   Boninelli, S ^a   Priolo, F ^a   Fortunato, G ^c   Privitera, V ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

^c CNR   (Italy)

^d UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS TRANSPORT; CONCENTRATION GRADIENTS; ELECTRICAL DEACTIVATION; EXCIMER LASER ANNEALING; MELT DEPTH; MOLTEN REGION;

EXCIMER LASERS; OPTOELECTRONIC DEVICES;

GERMANIUM;

EID: 84868014789     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4764069     Document Type: Article

References (30)

1. S. Takagi, T. Tezuka, T. Irisawa, S. Nakaharai, T. Numata, K. Usuda, N. Sugiyama, M. Shichijo, R. Nakane, and S. Sugahara, Solid State Electron. 51, 526 (2007). 10.1016/j.sse.2007.02.017
2. C. L. Royer, J.-F. Damlencourt, B. Vincent, K. Romanjek, Y. L. Cunff, H. Grampeix, V. Mazzocchi, V. Carron, F. Némouchi, J.-M. Hartmann, C. Arvet, C. Vizioz, C. Tabone, L. Hutin, P. Batude, and M. Vinet, Solid State Electron. 59, 2 (2011). 10.1016/j.sse.2011.01.012
3. C. Claeys, J. Mitard, G. Eneman, M. Meuris, and E. Simoen, Thin Solid Films 518, 2301 (2010). 10.1016/j.tsf.2009.08.027
4. E. Batail, S. Monfray, C. Tabone, O. Kermarree, J. F. Damlencourt, P. Gautier, G. Rabille, C. Arvet, N. Loubet, Y. Campidelli, J. M. Hartman, A. Pouydebasque, V. Delaye, C. L. Royer, G. Ghibaudo, T. Skotnicki, and S. Deleonibus, IEDM Tech. Dig. 2008, 397.
5. C. Claeys and E. Simoen, Germanium-Based Technologies - From Materials to Devices (Elsevier, Great Britain, 2007).
6. J. Liu, X. Sun, R. Camacho-Aguilera, L. C. Kimerling, and J. Michel, Opt. Lett. 35, 679 (2010). 10.1364/OL.35.000679
7. S.-L. Cheng, G. Shambat, J. Lu, H.-Y. Yu, K. Saraswat, T. I. Kamins, J. Vuckovic, and Y. Nishi, Appl. Phys. Lett. 98, 211101 (2011). 10.1063/1.3592837
8. D. Ahn, C.-Y. Hong, J. Liu, W. Giziewicz, M. Beals, L. C. Kimerling, J. Michel, J. Chen, and F. X. Kärtner, Opt. Express 7, 3916 (2007). 10.1364/OE.15.003916
9. J. Liu, M. Beals, A. Pomerene, S. Bernardis, R. Sun, J. Cheng, L. C. Kimerling, and J. Michel, Nat. Photonics 2, 433 (2008). 10.1038/nphoton.2008.99
10. T. Janssens, C. Huyghebaert, D. Vanhaeren, G. Winderickx, A. Satta, M. Meuris, and W. Vandervorst, J. Vac. Sci. Technol. B 24, 510 (2006). 10.1116/1.2151904
11. E. Bruno, G. G. Scapellato, G. Bisognin, E. Carria, L. Romano, A. Carnera, and F. Priolo, J. Appl. Phys. 108, 124902 (2010). 10.1063/1.3520671
12. L. Romano, G. Impellizzeri, M. V. Tomasello, F. Giannazzo, C. Spinella, and M. G. Grimaldi, J. Appl. Phys. 107, 084314 (2010). 10.1063/1.3372757
13. I. Suni, G. Göltz, M. A. Nicolet, and S. Lau, Thin Solid Films 93, 171 (1982). 10.1016/0040-6090(82)90102-X
14. J. S. Preston and H. M. van Driel, Phys. Rev. B 30, 1950 (1984). 10.1103/PhysRevB.30.1950
15. M. Mulato, D. Toet, G. Aichmayr, P. V. Santos, and I. Chambouleyron, J. Appl. Phys. 82, 5159 (1997). 10.1063/1.366320
16. G. Impellizzeri, L. Romano, L. Bosco, C. Spinella, and M. G. Grimaldi, Appl. Phys. Express 5, 021301 (2012). 10.1143/APEX.5.021301
17. A. L. Magna, P. Alippi, V. Privitera, G. Fortunato, M. Camalleri, and B. Svensson, J. Appl. Phys. 95, 4806 (2004). 10.1063/1.1690861
18. G. Mannino, V. Privitera, A. L. Magna, E. Rimini, E. Napolitani, G. Fortunato, and L. Mariucci, Appl. Phys. Lett. 86, 051909 (2005). 10.1063/1.1856696
19. A. L. Magna, V. Privitera, G. Fortunato, M. Cuscunà, B. G. Svensson, E. Monakhov, K. Kuitunen, J. Slotte, and F. Tuomisto, Phys. Rev. B 75, 235201 (2007). 10.1103/PhysRevB.75.235201
20. G. Contreras, L. Tapfer, A. K. Sood, and M. Cardona, Phys. Status Solidi B 131, 475 (1985). 10.1002/pssb.2221310208
21. P. Tsouroutas, D. Tsoukalas, I. Zergioti, N. Cherkashin, and A. Claverie, J. Appl. Phys. 105, 094910 (2009). 10.1063/1.3117485
22. G. Bisognin, S. Vangelista, and E. Bruno, Mater. Sci. Eng. B 154-155, 64 (2008). 10.1016/j.mseb.2008.08.002
23. S. Koffel, P. Scheiblin, A. Claverie, and G. Benassayag, J. Appl. Phys. 105, 013528 (2009). 10.1063/1.3041653
24. S. Brotzmann and H. Bracht, J. Appl. Phys. 103, 033508 (2008). 10.1063/1.2837103
25. A. Chroneos, H. Bracht, R. W. Grimes, and B. P. Uberuaga, Appl. Phys. Lett. 92, 172103 (2008). 10.1063/1.2918842
26. A. Chroneos, R. W. Grimes, B. P. Uberuaga, and H. Bracht, Phys. Rev. B 77, 235208 (2008). 10.1103/PhysRevB.77.235208
27. A. Chroneos, J. Appl. Phys. 107, 076102 (2010). 10.1063/1.3361115
28. W. Szyszko, Appl. Surf. Sci. 90, 325 (1995). 10.1016/0169-4332(95)00076-3
29. J. W. Orton, The Story of Semiconductor (Oxford University Press, 2004), p. 56.
30. S. Brotzmann, H. Bracht, J. L. Hansen, A. N. Larsen, E. Simoen, E. E. Haller, J. S. Christensen, and P. Werner, Phys. Rev. B 77, 235207 (2008). 10.1103/PhysRevB.77.235207