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Journal of Applied Physics

Volumn 108, Issue 12, 2010, Pages

High-level incorporation of antimony in germanium by laser annealing

(7) Bruno, E a Scapellato, G G a Bisognin, G b Carria, E a Romano, L a Carnera, A b Priolo, F a

a UNIVERSITY OF CATANIA (Italy)

b UNIVERSITY OF PADOVA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY PHASE; ALTERNATIVE APPROACH; ANNEALING TEMPERATURES; CRYSTALLINE GERMANIUM; FLUENCES; GE SUBSTRATES; HEAVY-ION IMPLANTATION; HIGH MOBILITY; HOST LATTICE; LASER ANNEALING; LASER IRRADIATIONS; LATTICE DEFORMATION; MATRIX; PULSE LASER ANNEALING; SB-DOPED; SOLID SOLUBILITIES; STRUCTURAL DEFECT; THERMAL TREATMENT;

ANNEALING; ANTIMONY; HONEYCOMB STRUCTURES; ION IMPLANTATION;

GERMANIUM;

EID: 78650917930 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3520671 Document Type: Article

Times cited : (44)

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