메뉴 건너뛰기




Volumn 130, Issue 2, 2008, Pages 0210051-0210059

Studies on size and lubricant effects for fluidic self-assembly of microparts on patterned substrate using capillary effect

Author keywords

Fluidic self assembly (FSA); Lubricant; Micropart; Self assembled monolayer (SAM)

Indexed keywords

BINDING SITES; LUBRICANTS; PHASE INTERFACES; SELF ASSEMBLY; SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS; SUBSTRATES;

EID: 47749122974     PISSN: 10437398     EISSN: 15289044     Source Type: Journal    
DOI: 10.1115/1.2912216     Document Type: Article
Times cited : (9)

References (27)
  • 1
    • 0004015110 scopus 로고    scopus 로고
    • Assembly Techniques for Microelectromechanical Systems,
    • Ph.D. dissertation, University of California at Berkeley, Berkeley, CA
    • Cohn, M. B., 1997, "Assembly Techniques for Microelectromechanical Systems," Ph.D. dissertation, University of California at Berkeley, Berkeley, CA.
    • (1997)
    • Cohn, M.B.1
  • 3
    • 0028445213 scopus 로고
    • Fluidic Assembly for the Integration of GaAs Light-Emitting Diodes on Si Substrates
    • Yeh, H. J., and Smith, J. S., 1994, "Fluidic Assembly for the Integration of GaAs Light-Emitting Diodes on Si Substrates," IEEE Photonics Technol. Lett., 46, pp. 706-709.
    • (1994) IEEE Photonics Technol. Lett , vol.46 , pp. 706-709
    • Yeh, H.J.1    Smith, J.S.2
  • 5
    • 0035278843 scopus 로고    scopus 로고
    • Microstructure to Substrate Self-Assembly Using Capillary Forces
    • Srinivsan, U., Liepmann, D., and Howe, R. T., 2001, "Microstructure to Substrate Self-Assembly Using Capillary Forces," J. Microelectromech. Syst., 10(1), pp. 17-24.
    • (2001) J. Microelectromech. Syst , vol.10 , Issue.1 , pp. 17-24
    • Srinivsan, U.1    Liepmann, D.2    Howe, R.T.3
  • 6
    • 85199249606 scopus 로고    scopus 로고
    • Controlled Multi-Batch Self-Assembly of Micro Devices,
    • Technical Report No. UWEETR-2002-2006, Department of Electrical Engineering, University of Washington, Seattle, Seattle, WA
    • Xiong, X., Hanein, Y., Fang, J., Wang, Y., Wang, W., Schwartz, D. T., and Bohringer, K. F., 2002, "Controlled Multi-Batch Self-Assembly of Micro Devices," Technical Report No. UWEETR-2002-2006, Department of Electrical Engineering, University of Washington, Seattle, WA.
    • (2002)
    • Xiong, X.1    Hanein, Y.2    Fang, J.3    Wang, Y.4    Wang, W.5    Schwartz, D.T.6    Bohringer, K.F.7
  • 7
    • 16244380333 scopus 로고    scopus 로고
    • Surface Modification and Modulation in Microstructures: Controlling Protein Adsorption, Monolayer Desorption, and Micro-Self-Assembly
    • Bohringer, K. F., 2003, "Surface Modification and Modulation in Microstructures: Controlling Protein Adsorption, Monolayer Desorption, and Micro-Self-Assembly," J. Micromech. Microeng., 13, pp. S1-S10.
    • (2003) J. Micromech. Microeng , vol.13
    • Bohringer, K.F.1
  • 8
    • 18744371116 scopus 로고    scopus 로고
    • Resin Self-Alignment Process for Self-Assembly Systems
    • Kim, J. M., Yasuda, K., and Fujimoto, K., 2005, "Resin Self-Alignment Process for Self-Assembly Systems," ASME J. Electron. Packag., 127, pp. 18-24.
    • (2005) ASME J. Electron. Packag , vol.127 , pp. 18-24
    • Kim, J.M.1    Yasuda, K.2    Fujimoto, K.3
  • 9
    • 0037066541 scopus 로고    scopus 로고
    • Fabrication of a Cylindrical Display by Patterned Assembly
    • Jacobs, H. O., Tao, A. R., Schwartz, A., Gracias, D. H., and Whitesides, G. M., 2002, "Fabrication of a Cylindrical Display by Patterned Assembly," Science, 296, pp. 323-325.
    • (2002) Science , vol.296 , pp. 323-325
    • Jacobs, H.O.1    Tao, A.R.2    Schwartz, A.3    Gracias, D.H.4    Whitesides, G.M.5
  • 11
    • 0037217585 scopus 로고    scopus 로고
    • Self-Alignment of Microparts Using Liquid Surface Tension-Behavior of Microparts and Alignment Characteristics
    • Sato, K., Ito, K., Hata, S., and Schimokohbe, A., 2003, "Self-Alignment of Microparts Using Liquid Surface Tension-Behavior of Microparts and Alignment Characteristics," Precis. Eng., 27, pp. 42-50.
    • (2003) Precis. Eng , vol.27 , pp. 42-50
    • Sato, K.1    Ito, K.2    Hata, S.3    Schimokohbe, A.4
  • 13
    • 33645064258 scopus 로고    scopus 로고
    • Parallel Micro Component-to-Substrate Assembly With Controlled Poses and High Surface Coverage
    • Fang, J., and Bohringer, K. F., 2006, "Parallel Micro Component-to-Substrate Assembly With Controlled Poses and High Surface Coverage," J. Micromech. Microeng., 16, pp. 721-730.
    • (2006) J. Micromech. Microeng , vol.16 , pp. 721-730
    • Fang, J.1    Bohringer, K.F.2
  • 14
    • 85199284040 scopus 로고    scopus 로고
    • Soga, I., Ohno, Y., Kishimoto, S., Maezawa, K., and Mizutani, T., 2003, Fluid Dynamic Assembly of Semiconductor Blocks for Heterogeneous Integration, Jpn. J. Appl. Phys., Part 1, 42,(2B), pp. 2226-2229.
    • Soga, I., Ohno, Y., Kishimoto, S., Maezawa, K., and Mizutani, T., 2003, "Fluid Dynamic Assembly of Semiconductor Blocks for Heterogeneous Integration," Jpn. J. Appl. Phys., Part 1, 42,(2B), pp. 2226-2229.
  • 15
    • 9744276740 scopus 로고    scopus 로고
    • Shape-and-Solder-Directed Self-Assembly to Package Semiconductor Device Segments
    • Zheng, W., and Jacobs, H. O., 2004, "Shape-and-Solder-Directed Self-Assembly to Package Semiconductor Device Segments," Appl. Phys. Lett., 85, pp. 3635-3637.
    • (2004) Appl. Phys. Lett , vol.85 , pp. 3635-3637
    • Zheng, W.1    Jacobs, H.O.2
  • 16
    • 4444313556 scopus 로고    scopus 로고
    • Sequential Shape-and-Solder-Directed Self-Assembly of Functional Microsystems
    • Zheng, W., Buhlmann, P., and Jacobs, H. O., 2004, "Sequential Shape-and-Solder-Directed Self-Assembly of Functional Microsystems," Proc. Natl. Acad. Sci. U.S.A., 101, pp. 12814-12817.
    • (2004) Proc. Natl. Acad. Sci. U.S.A , vol.101 , pp. 12814-12817
    • Zheng, W.1    Buhlmann, P.2    Jacobs, H.O.3
  • 17
    • 18744382529 scopus 로고    scopus 로고
    • Fabrication of Multicomponent Microsystems by Directed Three Dimensional Self-Assembly
    • Zheng, W., and Jacobs, H. O., 2005, "Fabrication of Multicomponent Microsystems by Directed Three Dimensional Self-Assembly," Adv. Funct. Mater., 15, pp. 732-738.
    • (2005) Adv. Funct. Mater , vol.15 , pp. 732-738
    • Zheng, W.1    Jacobs, H.O.2
  • 18
    • 32644446033 scopus 로고    scopus 로고
    • Self-Assembly of Micro-Parts Onto Si Substrates at Liquid-Liquid Interface
    • Liu, M., Zhang, J.-G., Ya, L.-V., and Xia, S.-H., 2006, "Self-Assembly of Micro-Parts Onto Si Substrates at Liquid-Liquid Interface," Chin. Phys. Lett., 23(1), pp. 42-44.
    • (2006) Chin. Phys. Lett , vol.23 , Issue.1 , pp. 42-44
    • Liu, M.1    Zhang, J.-G.2    Ya, L.-V.3    Xia, S.-H.4
  • 19
    • 33749024420 scopus 로고    scopus 로고
    • Self-Assembled Single-Crystal Silicon Circuits on Plastic
    • Stauth, S. A., and Parviz, B. A., 2006, "Self-Assembled Single-Crystal Silicon Circuits on Plastic," Proc. Natl. Acad. Sci. U.S.A., 103, pp. 13922-13927.
    • (2006) Proc. Natl. Acad. Sci. U.S.A , vol.103 , pp. 13922-13927
    • Stauth, S.A.1    Parviz, B.A.2
  • 20
    • 85199268380 scopus 로고    scopus 로고
    • Ramadan, Q., Uk, Y. S., and Vaidyanathan, K., 2007, Large Scale Microcomponents Assembly Using an External Magnetic Array, Appl. Phys. Lett., 90, pp. 2502-2504.
    • Ramadan, Q., Uk, Y. S., and Vaidyanathan, K., 2007, "Large Scale Microcomponents Assembly Using an External Magnetic Array," Appl. Phys. Lett., 90, pp. 2502-2504.
  • 21
    • 0001045252 scopus 로고    scopus 로고
    • Selective Dip-Coating of Chemically Micropatterned Surfaces
    • Darhuber, A. A., Troian, S. M., Davis, J. M., and Miller, S. M., 2000, "Selective Dip-Coating of Chemically Micropatterned Surfaces," J. Appl. Phys., 88(9), pp. 5119-5126.
    • (2000) J. Appl. Phys , vol.88 , Issue.9 , pp. 5119-5126
    • Darhuber, A.A.1    Troian, S.M.2    Davis, J.M.3    Miller, S.M.4
  • 24
    • 27644513652 scopus 로고    scopus 로고
    • Microoptical Characterization and Modeling of Positioning Forces on Drosophila Embryos Self-Assembled in Two-Dimensional Arrays
    • Zhang, X. J., Chen, C.-C., Bernstein, R. W., Zappe, S., Scott, M. P., and Solgaard, O., 2005, "Microoptical Characterization and Modeling of Positioning Forces on Drosophila Embryos Self-Assembled in Two-Dimensional Arrays," J. Microelectromech. Syst., 14(5), pp. 1187-1197.
    • (2005) J. Microelectromech. Syst , vol.14 , Issue.5 , pp. 1187-1197
    • Zhang, X.J.1    Chen, C.-C.2    Bernstein, R.W.3    Zappe, S.4    Scott, M.P.5    Solgaard, O.6
  • 26
    • 85199288837 scopus 로고    scopus 로고
    • Small Parts Inc
    • Small Parts Inc., http://www.smallparts.com.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.