A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM

Review of Scientific Instruments

Volumn 83, Issue 9, 2012, Pages

  Romeis, S ^a   Paul, J ^a   Ziener, M ^a   Peukert, W ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICA; CLOSED LOOPS; COARSE POSITIONING; COMPRESSION EXPERIMENTS; DATA CORRECTIONS; EIGENFREQUENCY; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; FORCE CALIBRATION; FORCE DETECTION; FORCE RESOLUTION; FORCE SENSOR; HIGH RESOLUTION; IN-SITU; IN-SITU COMPRESSION; LINEAR VARIABLE DIFFERENTIAL TRANSFORMER; LOAD CELLS; MANIPULATION DEVICES; NEW DEVICES; NORMAL DIRECTION; PIEZOELECTRIC SCANNER; SAMPLE DEFORMATION; SELFLOCKING; SPRING CONSTANTS; SUBMICRON; SUBMICRON SCALE; SUBMICRON STRUCTURES;

CALIBRATION; DEFORMATION; SENSORS; SILICA;

INSTRUMENTS;

EID: 84866996331     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4749256     Document Type: Review

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