A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 495-499

  Motoki, T ^a   Gao, W ^a   Kiyono, S ^a   Ono, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Depth; Instrumentation; Load; Mechanical property; Micro nano structured surface; Nanoindentation; Scanning electron microscope; Tungsten indenter

Indexed keywords

ACTUATORS; INDENTATION; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER; PROBES; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; TUNGSTEN;

DEPTH; INSTRUMENTATION; LOAD; MICRO/NANO-STRUCTURED SURFACE; NANOINDENTATION; TUNGSTEN INDENTER;

ELECTROMECHANICAL DEVICES;

ACTUATORS; ELECTROMECHANICAL DEVICES; INDENTATION; MECHANICAL PROPERTIES; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER; PROBES; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; TUNGSTEN;

EID: 31744445826     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S06     Document Type: Article

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