ZrLaO x/ZrTiO x/ZrLaO x Laminate as Insulator for MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Using Canceling Effect

IEEE Electron Device Letters

Volumn 33, Issue 10, 2012, Pages 1447-1449

  Chen, Lun Lun ^a   Wu, Yung Hsien ^a   Lin, Yu Bo ^a   Lin, Chia Chun ^a   Wu, Min Lin ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Canceling effect; metal insulator metal (MIM) capacitors; negative quadratic voltage coefficient of capacitance (VCC ); ZrLaO x ZrTiO x ZrLaO x laminate

Indexed keywords

CANCELING EFFECT; CAPACITANCE DENSITY; FREQUENCY DISPERSION; HIGH-CAPACITANCE DENSITY; INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS; LAMINATED STRUCTURES; METAL INSULATOR METAL CAPACITOR (MIM); MIM CAPACITORS; VOLTAGE COEFFICIENT; VOLTAGE COEFFICIENT OF CAPACITANCES;

CAPACITANCE; CAPACITORS;

MIM DEVICES;

EID: 84866910764     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2209396     Document Type: Article

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