Engineering of voltage nonlinearity in high-K MIM capacitor for analog/mixed-signal ICs

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 2004, Pages 218-219

  Kim, Sun Jung ^a   Cho, Byung Jin ^a   Li, M F ^a,b   Ding, S J ^a   Yu, M B ^b   Zhu, Chunxiang ^a   Chin, Albert ^c   Kwong, D L ^d  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^d UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE DENSITY; CARRIER INJECTIONS; TOP ELECTRODES; VOLTAGE LINEARITY COEFFICIENTS (VCC);

CAPACITORS; DIELECTRIC FILMS; ELECTRIC POTENTIAL; FREQUENCIES; HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; MICROPROCESSOR CHIPS; SILICA; THICKNESS CONTROL;

MIM DEVICES;

EID: 4544353246     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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