High-throughput UV nanoimprint process using flexible resin mold for high-brightness light-emitting diodes

IEEJ Transactions on Sensors and Micromachines

Volumn 132, Issue 8, 2012, Pages 235-239

  Shinohara, Hidetoshi ^a   Tashiro, Takaharu ^a   Ookawa, Takafumi ^a   Nishihara, Hiromi ^a  

^a Toshiba Machine Co Ltd   (Japan)

Author keywords

Light emitting diodes; Resin mold; UV nanoimprinting

Indexed keywords

DIODES; FABRICATION; LUMINANCE; MOLDS; NANOIMPRINT LITHOGRAPHY; NANOSTRUCTURES; RESINS; THROUGHPUT;

FABRICATION PROCESS; HIGH BRIGHTNESS; HIGH BRIGHTNESS LEDS; HIGH THROUGHPUT; MOLD FABRICATION; RESIDUAL LAYERS; UV-NANOIMPRINT; UV-NANOIMPRINTING;

LIGHT EMITTING DIODES;

EID: 84866860028     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.132.235     Document Type: Article

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