Evaluation of UV roller imprinting using replicated fluorinated film molds

NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Volumn , Issue , 2011, Pages 1254-1257

  Shibazaki, T ^a   Li, L ^a   Shinohara, H ^a   Shoji, S ^a   Mizuno, J ^a   Tsunozaki, K ^b   Kawaguchi, Y ^b  

^a WASEDA UNIVERSITY   (Japan)

^b ASAHI GLASS CO LTD   (Japan)

Author keywords

effect of heat; fluorinated UV curable resin; stage direction of movement; UV roller imprinting; UV roller press imprinting

Indexed keywords

EFFECT OF HEAT; FLUORINATED FILMS; LINE-AND-SPACE; MOLD FABRICATION; PATTERN REPLICATION; ROLLER IMPRINTING; ROLLER PRESS; UV IMPRINTING; UV-CURABLE RESINS; UV-CURING;

CURING; MOLDS; PRESSES (MACHINE TOOLS); RESINS; THERMODYNAMIC PROPERTIES; VICKERS HARDNESS;

ROLLERS (MACHINE COMPONENTS);

EID: 80053313653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2011.6017585     Document Type: Conference Paper

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