Anti-sticking curing of fluorinated polymers for improvement of mold releasability

Journal of Photopolymer Science and Technology

Volumn 24, Issue 1, 2011, Pages 89-93

  Mizuno, Jun ^a   Li, Lingyi ^a   Kawaguchi, Yasuhide ^b   Tsunozaki, Kentaro ^b   Shinohara, Hidetoshi ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

^b ASAHI GLASS CO LTD   (Japan)

Author keywords

Fluorinated polymer; Mold releasability; Pattern shrinkage; Post curing process

Indexed keywords

EID: 79961115634     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.24.89     Document Type: Article

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