Large-area submicron replica molding of porous low-k dielectric films and application to photonic crystal biosensor fabrication

Microelectronic Engineering

Volumn 84, Issue 4, 2007, Pages 603-608

  Block, Ian D ^a   Chan, Leo L ^a   Cunningham, Brian T ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Low k; Optical biosensor; Replica molding; Sol gel glass

Indexed keywords

BIOSENSORS; GLASS; PHOTONIC CRYSTALS; POROUS MATERIALS; SHRINKAGE; SOL-GEL PROCESS;

BIOSENSOR FABRICATION; OPTICAL RESONANCE; PHOTONIC CRYSTAL SENSORS; SCANNING ELECTRON MICROGRAPHS;

DIELECTRIC FILMS;

EID: 33847685269     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.12.011     Document Type: Article

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