Plasma directed organization of nanodots on polymers: Effects of polymer type and etching time on morphology and order

Plasma Processes and Polymers

Volumn 9, Issue 9, 2012, Pages 866-872

  Kontziampasis, Dimitrios ^a   Constantoudis, Vassilios ^a   Gogolides, Evangelos ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

directed assembly; metrological characterization; nanofabrication; O 2 plasmas; polymers

Indexed keywords

DIRECTED ASSEMBLY; DUAL SCALE; ETCHING TIME; METROLOGICAL CHARACTERIZATION; NANODOTS; OXYGEN PLASMA ETCHING; TRANSITION POINT;

ESTERS; MORPHOLOGY; NANOTECHNOLOGY; PLASMA ETCHING; POLYETHYLENE TEREPHTHALATES; POLYSTYRENES; SURFACE ROUGHNESS;

POLYMERS;

EID: 84866348864     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201100163     Document Type: Article

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